How Chemical Carts Provide Safe Handling and Disposal of Chemicals

The chemicals used in the etching and cleaning semiconductor wafers are usually aggressive. That’s why it’s crucial that they should be stored, delivered to the process, and disposed of properly and safely.

Chemical handling equipment, such as chemical carts (also referred to as chemical pump carts or chemical collection carts), are a convenient way to remove waste chemicals from the process and ready them for disposal.

Modutek’s chemical carts are specifically designed for safe pumping and containment of the chemicals and for moving them to a safe location for further treatment. They allow operators to quickly remove used chemicals from a process line and let the process continue to the next step with a minimum of delay. They are easily rolled up to the process tank that contains the used chemicals and operators can safely transfer even toxic or corrosive chemicals. 

Chemical cart design features:

  • Compact profile at 36 inches long, 18 inches wide, and 42 inches high.
  • Made of white polypropylene resistant against acids (also available in stainless steel for solvent applications).
  • Mounted on lockable swivel casters.
  • Suction wand for emptying process tanks.
  • Independent discharge tube for transfer of waste chemicals to a neutralization system.
  • Pneumatic pump, three-eighths inch.
  • On-cart five-gallon chemical tank with double containment (Department of Transport-approved).
  • High-level sensor interlocked with pump for added safety.
  • All-Teflon piping.

Modutek’s chemical carts allow operators to receive, store, deliver, and discharge these toxic and dangerous chemicals safely. These well-designed carts can help reduce waste, deliver accurate dosages to the process, and track chemical use.

Containment of spills is a crucial safety and environmental issue that can be addressed by good design practices. Modutek’s extensive experience with wet process technology and acids used ensure that the company’s chemical handling equipment operate in a completely safe and reliable manner.

Units similar to chemical carts can take on other functions. For instance, chemical delivery system can handle chemical reception, storage, and delivery to the process. They can include bulk storage such as in large tote chemical containers that can supply high volumes of chemicals, or 55-gallon drums located at the process. These systems can include software for dosage control and software can also control the mixing of chemicals.

Read our newest article, How Chemical Carts Provide Safe Handling and Disposal of Chemicals, to learn more. If you would like to discuss your specific needs or get answers to your questions, contact us via email at or by calling 866-803-1533.

How Chemical Carts Support Chemical Disposal

Chemical disposal is often associated with adhering to increasing local regulatory compliance. The solution is to either remove used chemicals for off-site disposal or use dedicated equipment for disposal according to official guidelines to address these difficulties.

Chemical carts remove chemicals quickly and safely. They can be rolled over to process stations and can pump used chemicals to a container on the cart. The used chemicals can then be turned over to a disposal company or neutralized and treated at the onsite facility. The manufacturing process can continue with a fresh batch of chemicals while documentation and handling of the used chemicals can be carried out according to local regulations.

Once the chemicals for a process step has been used, they have to be drained from the process tank so that the next process batch can begin. The use of chemical handling equipment, such as pump carts, provides a flexible solution that allows operators to remove used chemicals from the process tanks for different process steps.

The operator can roll the chemical pump cart to the tank that holds the used chemicals and use the suction wand to pump the chemicals out of the process tank. The used chemicals are pumped into a dedicated storage tank on the chemical pump cart; after that, the chemical cart can be rolled out to a designated disposal area.

Whether the company has chemical neutralization and disposal in-house or not, the chemicals can be transferred to a disposal system or turned over to an external chemical specialist. Either way, the company must prepare documentation for handling chemicals according to local laws and regulations before proceeding to the final disposal.

Modutek’s chemical pump carts are compact and easy to roll out. They are built with white polypropylene and can be moved with swivel casters (with brakes) and have individual suction and discharge tubes. Pumping is with a 3/8th-inch pneumatic pump. The five-gallon chemical tank features a double containment system and is DOT-approved. For additional safety, the cart has a high-level sensor, which is interlocked with the pump. The plumbing is all Teflon, and each cart can handle multiple applications.

Several options that can be included in the tank include chemical carts delivered in a stainless-steel design for solvent applications; a pressure interlock safety switch; a large capacity tank; a double dump design, among others. Customers can decide on any of these options to meet specific requirements.

Learn more by reading the complete article How Chemical Carts Support Chemical Disposal as well as Modutek’s complete line of chemical handling equipment. To schedule a free consultation or quote, contact Modutek at or call 866-803-1533.